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About SEMI International Standards

The SEMI International Standards Program brings experts from the flat panel display and related industries together to exchange ideas and work jointly to develop globally accepted technical standards. The results of this activity enable positive growth and economic benefit to the industries that SEMI serves. SEMI Standards contribute to faster commercialization and time-to-market, especially for new and emerging technologies. SEMI Standards are developed through the organization of a variety of standards committees comprised by over 1,500 volunteers, through partnerships and collaborations with other standards organizations, though training and industry-wide education, and other activities.

    
   
 

Flat Panel Display

The Flat Panel Display Volume consists of standards for materials and equipment used in the manufacture and test of active matrix liquid crystal display (AMLCD) assemblies. Recent efforts have focused on terminology, flat panel display substrate characteristics (i.e., size, thickness, quality area, surface roughness), and carrier specifications. The largest membership is in Japan, with involvement growing in the North American and European communities.

Note:
Many of the SEMI Standards listed below contain a set of subordinate documents identified as SEMI D##.1, SEMI D##.2, SEMI D##.3, etc.

    
        

SEMI Standards—Simplifying the FPD Manufacturing Process

SEMI has developed international standards for semiconductor manufacturing for the past 35 years. SEMI expanded its International Standards Program activities into FPD, aided by key similarities between chipmaking and display fabrication technologies. Read More

Korean FPD Standards Committee Approves Initiatives on FPD Substrates

If your company plays an active role in the global flat panel display markets you should be the first to know that the Korean FPD Standards Committee, part of SEMI's International Standards Program, recently approved three new Standards initiatives on FPD substrates. Read More

Korea FPD Working Group Receives Full Technical Committee Status

In recognition of their accomplishments, the Korea Flat Panel Display (FPD) Working Group was recently granted full Local Technical Committee status. They now join the FPD Factory Automation, Mask and Color Filter & Optical Elements Committees in Japan, and the North American FPD Committee. FPD Working Groups are also established in China and Taiwan. Read More

Japan Regional Standards Committee Tackles Tough EHS Standards

The Japan Regional Committee on Environmental, Health and Safety (EHS) Standards has drafted a proposed safety guideline to comprehensively address EHS issues in FPD manufacturing. The working document, Doc. #3814G, was prepared with significant input from Japan, Korea and North America FPD standards volunteers, and leverages many of the philosophies, approaches and techniques successfully used in the semiconductor industry through the widely-recognized SEMI S2. Read More

    
   

Doc #

Title

SEMI D10-95 (Reapproved 0703)

Test Method for Chemical Durability of Flat Panel Display Glass Substrates

SEMI D11-95 (Reapproved 0703)

Specification for Flat Panel Display Glass Substrate Cassettes

SEMI D12-95 (Reapproved 0703)

Specification for Edge Condition of Flat Panel Display (FPD) Substrates

SEMI D13-1101

Terminology for FPD Color Filters

SEMI D15-1296 (Reapproved 0703)

FPD Glass Substrate Surface Waviness Measurement Method

SEMI D16-0998

Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port

SEMI D17-0200

Mechanical Specification for Cassettes Used to Ship Flat Panel Display Glass Substrates

SEMI D18-0299E

Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates

SEMI D19-0299E

Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters

SEMI D19-0305

Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters

SEMI D20-0706

Terminology for FPD Mask Defect

SEMI D20-1000

Defect Terminology for Flat Panel Display Masks

SEMI D21-0706

Terminology for FPD Mask Pattern Accuracy

SEMI D21-1000

Terminology for Flat Panel Display Masks

SEMI D22-1103

Test Method for the Determination of Color, Transmittance of FPD Color Filter Assemblies

SEMI D23-0999

Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment

SEMI D24-0200

Specification for Glass Substrates Used to Manufacture Flat Panel Displays

SEMI D24-0200 (Reapproved 0706)

Specification for Glass Substrates Used to Manufacture Flat Panel Displays

SEMI D25-0600E

Specification for Flat Panel Display Substrate Shipping Case

SEMI D25-0600E (Reapproved 0706)

Specification for Flat Panel Display Substrate Shipping Case

SEMI D26-1000

Provisional Specification for Large Area Masks for Flat Panel Displays (North America)

SEMI D27-1000

Guide for Flat Panel Display Equipment Communication Interfaces

SEMI D28-1101

Specification for Mechanical Interface between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV)

SEMI D29-1101

Test Method for Heat Resistance in Flat Panel Display (FPD) Color Filters

SEMI D29-1101 (Reapproved 0707)

Test Method for Heat Resistance in Flat Panel Display (FPD) Color Filters

SEMI D3-91 (Reapproved 0703)

Quality Area Specification for Flat Panel Display Substrates

SEMI D30-0707

Test Method for Light Resistance in Flat Panel Display (FPD) Color Filters

SEMI D30-1101

Test Method for Light Resistance in Flat Panel Display (FPD) Color Filters

SEMI D31-1102

Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection

SEMI D32-0303

Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification

SEMI D33-0703

Measuring Method of Optical Characteristics for Backlight Unit

SEMI D34-0703

Test Method for Measurement of FPD Polarizing Films

SEMI D35-1103E

Test Method for Measurement of Cold Cathode Fluorescent Lamp (CCFL) Characteristics

SEMI D36-0306

Terminology for LCD Backlight Unit

SEMI D36-1103

Terminology for LCD Backlight Unit

SEMI D37-0304

Specification for Liquid Crystal Display (LCD) Pellicles

SEMI D38-0304

Guide for Quality Area of LCD Masks

SEMI D39-0704

Specification for Markers on FPD Polarizing Films

SEMI D40-0704

Terminology for FPD Substrate Deflection

SEMI D41-0305

Measurement Method of SEMI MURA in FPD Image Quality Inspection

SEMI D42-0305

Specification for Ultra Large Size Mask Substrate Case

SEMI D43-1105

Test Method for Mechanical Vibration in AMHS for FPD Manufacturing

SEMI D44-0706

Specification for Reference Position of Single Substrate for Handing Off On Tool

SEMI D44-0706E

Specification for Reference Position of Single Substrate for Handing Off On Tool

SEMI D45-0706

Measurement Methods for Resistance of Resin Black Matrix with High Resistance for FPD Color Filter

SEMI D46-0706

Terminology for FPD Polarizing Films

SEMI D47-0307

TEST METHOD FOR MEASUREMENT OF BENT COLD CATHODE FLUORESCENT LAMPS

SEMI D48-0307

Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool

SEMI D49-0707

Specification of Single Substrate Orientation for Loading/Unloading Into/From Equipment to Specify ID Reader Position

SEMI D5-94 (Reapproved 0703)

Standard Size for Flat Panel Display Substrates

SEMI D50-0707

Test Method for Surface Hardness of FPD Polarizing Film

SEMI D6-0305

Specification for Liquid Crystal Display (LCD) Mask Substrates

SEMI D6-1101

Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates

SEMI D7-94 (Reapproved 0703)

FPD Glass Substrate Surface Roughness Measurement Method

SEMI D9-0303

Terminology for FPD Substrates

SEMI T8-0698E (Reapproved 1104)

Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol

    


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